3D simulation of feed rod melting in floating zone silicon single crystal growth

M. Plāte - A. Krauze - J. Virbulis

Faculty of Physics and Mathematics, University of Latvia, 8 Zeļļu, Rīga, Latvia

Abstract
A three-dimensional (3D) transient model of the feed rod melting in the floating zone (FZ) silicon single crystal growth process is presented. Coupled 3D temperature, electromagnetic (EM), and melt film calculations are performed for a 4" FZ system, and the time evolution of the open melting front is described. The geometry and parameters from a converged state of quasi-stationary axisymmetric calculations of global heat transfer and phase boundaries are used as an initial condition for the time dependent simulations. A parametric study of the varied feed rod rotation rate, crystal pulling rate and width of the inductor main slit is carried out to analyze their influence on the non-symmetric shape of the feed rod. The unambiguous connection of the inductor geometry and feed rotation with the melting profiles is shown. Tables 1, Figs 9, Refs 10.