Precise calculations of the influence of HF EM forces on the melt hydrodynamics for FZ silicon single crystal growth

K. Dadzis¹ - A. Muiżnieks^1,2 - A. Rudeviċs¹ - G. Ratnieks³

¹ Department of Physics, University of Latvia, 8 Zellu str., LV-1002 Riga, Latvia
² Institute for Electrothermal Processes, University of Hanover, Wilhelm-Bush-Str. 4, D-30167 Hanover, Germany
³ Siltronic AG, Johannes-Hess-Str. 24, D-84489 Burghausen, Germany

Abstract
During the floating zone silicon single crystal growth by the needle-eye technique, the melting of the polycrystalline feed rod is ensured by a high-frequency inductor. It gives rise to electromagnetic (EM) forces in the skin layer at the free surface of the molten zone, which may influence the melt flow very distinctly. In the present paper two approaches to the numerical modelling of the EM forces in the case of a very distinct skin-effect are compared and applied to hydrodynamic calculations for a specific 2^′′ floating zone growth system. Figs 22, Refs 3.